Features single or multiple load ports that produce high resolution images 10X faster
Nanotronics unveiled nSpec TURBO at the SEMICON West annual conference, the flagship North American semiconductor tradeshow. This latest tool amongst the Nanotronics suite of inspection services is their fastest to-date, making it the most proficient tool for high-volume industrial inspection.
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The nSpec TURBO system runs multiple scans sequentially. User-friendly software makes configuring recipes effortless and easy to synchronize across multiple systems or locations.
“With the high-throughput, a more compact size, and advanced AI, nSpec TURBO will play a critical role in the effort to scale fabs quickly and less expensively,” said Matthew Putman, PhD, CEO, and co-founder of Nanotronics. “As we continue to face a supply chain crisis and raw materials shortage, this comes at an ideal time for high-volume manufacturers desperate to increase yields.”
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The nSpec TURBO addition to the Nanotronics portfolio enables high-throughput inspection of wafers ranging from 50 to 300mm wafers and large panels 10X faster to detect, quantify, and classify defects and features of interest. The system allows for high-volume manufacturers to have a tool with single or multiple load ports that can produce high resolution images in a matter of minutes.
“The release of this tool shows the progress of our ongoing work, and we are excited to meet the demand of both future and existing customers,” said Jonathan Lee, PhD, VP of Research and Development. “The nSpec TURBO system allows the user to acquire images of a 300mm sample at 1 micron resolution in about 45 seconds or at 0.5 micron resolution in about 130 seconds, with further improvements in the coming months.”
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